JPS6262020B2 - - Google Patents
Info
- Publication number
- JPS6262020B2 JPS6262020B2 JP52119319A JP11931977A JPS6262020B2 JP S6262020 B2 JPS6262020 B2 JP S6262020B2 JP 52119319 A JP52119319 A JP 52119319A JP 11931977 A JP11931977 A JP 11931977A JP S6262020 B2 JPS6262020 B2 JP S6262020B2
- Authority
- JP
- Japan
- Prior art keywords
- filament
- ion source
- metal
- melting point
- ionized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 150000002500 ions Chemical class 0.000 claims description 33
- 239000000126 substance Substances 0.000 claims description 22
- 238000002844 melting Methods 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- 230000008018 melting Effects 0.000 claims description 13
- 230000020169 heat generation Effects 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 description 12
- 239000011733 molybdenum Substances 0.000 description 12
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 11
- 238000000605 extraction Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- -1 molybdenum ions Chemical class 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11931977A JPS5452461A (en) | 1977-10-03 | 1977-10-03 | Ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11931977A JPS5452461A (en) | 1977-10-03 | 1977-10-03 | Ion source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5452461A JPS5452461A (en) | 1979-04-25 |
| JPS6262020B2 true JPS6262020B2 (en]) | 1987-12-24 |
Family
ID=14758501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11931977A Granted JPS5452461A (en) | 1977-10-03 | 1977-10-03 | Ion source |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5452461A (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0276218U (en]) * | 1988-11-29 | 1990-06-12 |
-
1977
- 1977-10-03 JP JP11931977A patent/JPS5452461A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0276218U (en]) * | 1988-11-29 | 1990-06-12 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5452461A (en) | 1979-04-25 |
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